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[snf-lithography] Morning Litho Status 1/21/2015

Gary J Sosa gsosa at stanford.edu
Wed Jan 21 07:52:37 PST 2015


Good morning All.. 
New Issues - 
None- 
	
General Information/Lab Activities 	
Wednesday, January 21, 2015 
	
Mahnaz- Extended shift coverage today(1/21). Hours: 10:00am – 7:00pm 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
PROBLEM 	
3 	
3D alignment system needs calibration 	
ASML to check and calibrate the 3D alignment system. Time TBD 
	
EVAlign 	
PROBLEM 	
2 	
Bottom objective not moving in X direction 	
Consulted with tech support. Advised that service visit is required. PO approved. Parts are on order. FSE scheduling to follow when parts are available. 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
	
New graphite needs rework 	
Sent back to vendor for further work. 
	
Prometrix 	
PROBLEM 	
	
Va/Vb ratio error 	
Continuing to monitor. OK to use 
	
CCI-HD 	
PROBLEM 	
4 	
Mouse not working 	
Need to investigate 
	
Woolam 	
DOWN 	
1 	
Lamp will not start 	
Lamp power supply died. Power supply and lamp house sent to Woollam for upgrade/repair
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