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[snf-lithography] Morning Litho Status 1/21/2015
Gary J Sosa
gsosa at stanford.edu
Wed Jan 21 07:52:37 PST 2015
Good morning All..
New Issues -
General Information/Lab Activities
Wednesday, January 21, 2015
Mahnaz- Extended shift coverage today(1/21). Hours: 10:00am – 7:00pm
3D alignment system needs calibration
ASML to check and calibrate the 3D alignment system. Time TBD
Bottom objective not moving in X direction
Consulted with tech support. Advised that service visit is required. PO approved. Parts are on order. FSE scheduling to follow when parts are available.
New graphite needs rework
Sent back to vendor for further work.
Va/Vb ratio error
Continuing to monitor. OK to use
Mouse not working
Need to investigate
Lamp will not start
Lamp power supply died. Power supply and lamp house sent to Woollam for upgrade/repair
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