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[snf-lithography] Morning Litho Status 1/22/2015

Gary J Sosa gsosa at stanford.edu
Thu Jan 22 07:30:21 PST 2015


Good morning All.. 
New Issues - 
Prometrix- Va/Vb ratio errors 
Karl Suss2 - Pulsing focus on right BSA objective 
	
General Information/Lab Activities 	
Thursday, January 22, 2015 
	




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
PROBLEM 	
	
3D alignment system needs calibration 	
ASML to check and calibrate the 3D alignment system. Time TBD 
	
EVAlign 	
PROBLEM 	
4 	
Bottom objective not moving in X direction 	
Consulted with tech support. Advised that service visit is required. PO approved. Parts are on order. FSE scheduling to follow when parts are available. 
	
Karlsuss2 	
PROBLEM 	
3 	
Right BSA focus problem 	
Need to investigate 
	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
	
New graphite needs rework 	
Sent back to vendor for further work. 
	
Prometrix 	
PROBLEM 	
2 	
Va/Vb ratio error 	
Need to investigate 
	
CCI-HD 	
PROBLEM 	
	
Mouse not working 	
Need to investigate 
	
Woolam 	
DOWN 	
1 	
Lamp will not start 	
Lamp power supply died. Power supply and lamp house received by Woollam for upgrade/repair. 
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