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[snf-lithography] Morning Litho Status 1/26/2015
Gary J Sosa
gsosa at stanford.edu
Mon Jan 26 09:52:00 PST 2015
Good morning All..
New Issues -
SVGDev1 - User reports that program is not running
General Information/Lab Activities
Monday, January 26, 2015
EVBonder- Changing pressure plate from Quartz to Steel today
3D alignment system needs calibration
ASML to check and calibrate the 3D alignment system. Time TBD
Bottom objective not moving in X direction
Consulted with tech support. Advised that service visit is required. PO approved. Parts are on order. FSE scheduling to follow when parts are available.
Right BSA focus problem
Contacting field service for technical support
Program not running
Need to test system
New graphite needs rework
Sent back to vendor for further work.
Va/Vb ratio error
Lamp will not start
Lamp power supply died. Power supply and lamp house received by Woollam for upgrade/repair.
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