Search Mailing List Archives


Limit search to: Subject & Body Subject Author
Sort by: Reverse Sort
Limit to: All This Week Last Week This Month Last Month
Select Date Range     through    

[snf-lithography] Litho AM Daily Report 1/29/15

Mario vilanova at stanford.edu
Thu Jan 29 07:43:56 PST 2015


*/Good morning All../*

*_New Issues_/-/*

*NONE*

*General Information/Lab Activities*

	

*Thursday, January 29, 2015***

*Gary Sosa Extended Shift 10:00AM - 7:00PM*

**

*//*

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

PROBLEM

	

	

3D alignment system needs calibration

	

*/ASML to check and calibrate the 3D alignment system. Time TBD/*

EVAlign

	

PROBLEM

	

4

	

Bottomobjective not moving in X direction

	

*/Consulted with tech support. Advised that service visit is required. 
PO approved. Parts are on order. FSE scheduling to follow when parts are 
available./*

Karlsuss2

	

PROBLEM

	

3

	

Right BSA focus problem

	

*/Contacting field service for technical support/*

BLUE M Oven

	

PROBLEM

	

2

	

Badger Box Enable/ Disable Not Functioning Properly

	

*/Need to Replace the Box and Work with MIke Bell to get a new IP Address
/*

Miscellaneous

	

	

	

	

EVBonder

	

PROBLEM

	

	

New graphite needsrework

	

*/Sent back to vendor for further work./*

Prometrix

	

PROBLEM

	

	

Va/Vb ratio error

	

*/Monitoring/*

Woolam

	

DOWN

	

1

	

Lamp will not start

	

*/Lamp power supply died. Power supply and lamp house received by 
Woollam for upgrade/repair. /*



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://mailman.stanford.edu/pipermail/snf-lithography/attachments/20150129/855aacb2/attachment-0001.html>


More information about the snf-lithography mailing list