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[snf-lithography] Morning Litho Status 1/30/2015

Gary J Sosa gsosa at stanford.edu
Fri Jan 30 07:25:27 PST 2015


Good morning All.. 
New Issues - 
None- 
	
General Information/Lab Activities 	
Friday, January 30, 2015 
	
Mario - Vacation 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
PROBLEM 	
	
3D alignment system needs calibration 	
ASML to check and calibrate the 3D alignment system. Time TBD 
	
EVAlign 	
PROBLEM 	
3 	
Bottom objective not moving in X direction 	
Consulted with tech support. Advised that service visit is required. PO approved. Parts are here. Arranging a FSE visit 
	
Karlsuss2 	
PROBLEM 	
2 	
Right BSA focus problem 	
Contacting field service for technical support 
	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
	
New graphite needs rework 	
Sent back to vendor for further work. 
	
Prometrix 	
PROBLEM 	
	
Va/Vb ratio error 	
Monitoring 
	
Woolam 	
DOWN 	
1 	
Lamp will not start 	
Expect delivery of repaired M2000 module today. Installation and setup to follow 
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