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[snf-lithography] Morning Litho Status 1/30/2015
Gary J Sosa
gsosa at stanford.edu
Fri Jan 30 07:25:27 PST 2015
Good morning All..
New Issues -
General Information/Lab Activities
Friday, January 30, 2015
Mario - Vacation
3D alignment system needs calibration
ASML to check and calibrate the 3D alignment system. Time TBD
Bottom objective not moving in X direction
Consulted with tech support. Advised that service visit is required. PO approved. Parts are here. Arranging a FSE visit
Right BSA focus problem
Contacting field service for technical support
New graphite needs rework
Sent back to vendor for further work.
Va/Vb ratio error
Lamp will not start
Expect delivery of repaired M2000 module today. Installation and setup to follow
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