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[snf-lithography] Morning Litho Status 3/1/2016
Gary J Sosa
gsosa at stanford.edu
Tue Mar 1 07:45:15 PST 2016
Good morning All..
General Information/Lab Activities
Tuesday, March 01, 2016
ASML Stepper- Notice: The combination to access the ASML Utility Reticles changes today. Please email your request to the Litho Team if you need access to these reticles.
System up with no restrictions
Repairs to upper electrode are more extensive. Upper electrode sent to EVG Factory in Austria for evaluation.
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