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[snf-lithography] Litho AM Daily report 3/10/16

Mario vilanova at stanford.edu
Thu Mar 10 07:36:46 PST 2016


*/Good morning All../*

*_New Issues_/- /*

*/None-/*

*General Information/Lab Activities*

	

*Thursday, March 10, 2016***

/**//*Gary S. Working  Late Shift Today */

**

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

EVBonder

	

DOWN

	

1

	

Turbo/pumping problem

	

*/Repairs to upper electrode are more extensive. Upper electrode sent to 
EVG Factory in Austria for evaluation. /*

	

	

	

	

*//*

	

	

	

	

*//*


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