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[snf-lithography] Morning Litho Status 3/11/2016

Gary J Sosa gsosa at stanford.edu
Fri Mar 11 07:47:15 PST 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Friday, March 11, 2016

Mario- Out today(3/11)




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions























Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Repairs to upper electrode are more extensive. Upper electrode sent to EVG Factory in Austria for evaluation.





















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