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[snf-lithography] Morning Litho Status 3/17/2016

Gary J Sosa gsosa at stanford.edu
Thu Mar 17 07:33:29 PDT 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Thursday, March 17, 2016

Gary- Out at 2:30pm today




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions



EVGSpraycoat

UP





6" conversion today











Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Repairs to upper electrode are more extensive. Upper electrode sent to EVG Factory in Austria for evaluation.






















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