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[snf-lithography] Morning Litho Status 3/25/2016

Gary J Sosa gsosa at stanford.edu
Fri Mar 25 07:31:00 PDT 2016


Good morning All...
New Issues-
None-
General Information/Lab Activities

Friday, March 25, 2016






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Repairs to upper electrode are more extensive. Upper electrode being repaired by the factory in Austria. ETA for return still TBD.





















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