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[snf-lithography] Litho Area Tools Daily Report 11/07/16

Mario vilanova at stanford.edu
Mon Nov 7 06:41:58 PST 2016


*/Good morning All../*

*_New Issues_/-/*

*None Over The Weekend *

*General Information/Lab Activities*

	

*Monday, November 07, 2016***

***Gary Sosa Out Today 11/07/16
*

****

****

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

AFM-nsil

	

PROBLEM

	

	

Buggy mouse in nanoscope image window

	

*/Will contact vendor for suggestions. Users have a work-around/*

	

	

	

	

*//*

	

	

	

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