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[snf-lithography] Morning Litho Status 11/8/2016

Gary J Sosa gsosa at stanford.edu
Tue Nov 8 07:52:22 PST 2016


Good morning All..
New Issues-
Woollam- User reports a Z stage issue
General Information/Lab Activities

Tuesday, November 08, 2016

[cid:a0452906-b64e-4502-a92e-a708fcb28f39]Election Day
Don't forget to get out and vote!


Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  AFM-nsil

PROBLEM

2

Buggy mouse in nanoscope image window

Working with users and vendors collecting data on problem.

Woollam

PROBLEM

1

Z stage issue

Need to check out












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