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[snf-lithography] Morning Litho Status 11/11/2016

Gary J Sosa gsosa at stanford.edu
Fri Nov 11 07:57:15 PST 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Friday, November 11, 2016

Notice- ksbonder and afm2 in room L 106 are shut down while contractors do facility work in the fingerwall. Check Badger for status changes

Mario- Out today(11/11)


Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  AFM-nsil

PROBLEM

1

Buggy mouse in nanoscope image window

Working with users and vendors collecting data on problem.

KSBonder

DOWN



Scheduled construction



AFM2

DOWN



Scheduled construction




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