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[snf-lithography] Morning Litho Status 11/16/2016

Gary J Sosa gsosa at stanford.edu
Wed Nov 16 07:31:04 PST 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Wednesday, November 16, 2016

Mahnaz- Vacation( 11/14 -11/18)

ASML Stepper: Scheduled Monthly PM. The tool is reserved from 7:00am until 4:00 pm on Tuesday, Wednesday and Thursday so that ASML F/S can do the Monthly PM. The tool may be released earlier depending on the progress of the PM. Please check Badger for updates and status changes.


Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  AFM-nsil

PROBLEM

1

Buggy mouse in nanoscope image window

Working with users and vendors collecting data on problem.






















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