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[snf-lithography] Morning Litho Status 11/22/2016

Gary J Sosa gsosa at stanford.edu
Tue Nov 22 07:51:28 PST 2016


Good morning All..
New Issues
None-


General Information/Lab Activities

Tuesday, November 22, 2016






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

Scheduled lamp change































Miscellaneous









  AFM-nsil

PROBLEM

1

Buggy mouse in nanoscope image window

Working with users and vendors collecting data on problem.

Woollam

PROBLEM

2

Z height range problem

Will check and adjust system alignment












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