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[snf-lithography] Litho Area Morning Tools Status 11/28/16

Mario vilanova at stanford.edu
Mon Nov 28 06:49:44 PST 2016


*/Good morning All../*

*_New Issues_*

*None-*

*General Information/Lab Activities*

	

*Monday, November 28, 2016***

*Gary Sosa out Sick 11/28/16
*

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*/
/*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

AFM-nsil

	

PROBLEM

	

1

	

Buggy mouse in nanoscope image window

	

*/Working with users and vendors collecting data on problem./*

Woollam

	

PROBLEM

	

2

	

Z height range problem

	

*/Will check and adjust system alignment/*

	

	

	

	

*//*

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