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[snf-lithography] Morning Litho Status 10/4/2016

Gary J Sosa gsosa at stanford.edu
Tue Oct 4 07:51:07 PDT 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Tuesday, October 04, 2016

Mahnaz- Out today (10/4)
Gary- Out at 3:30pm




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  AFM-nsil

PROBLEM

1

Background noise on all images

Still working on improvements












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