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[snf-lithography] Morning Litho Status 10/5/2016
Gary J Sosa
gsosa at stanford.edu
Wed Oct 5 07:46:04 PDT 2016
Good morning All..
General Information/Lab Activities
Wednesday, October 05, 2016
ASML Stepper- Scheduled downtime from 7:00am until 4:00pm to investigate and troubleshoot an alignment signal issue. Tool will not be available to Labmembers during this time. Please check Badger for updates and status changes.
ASML working on alignment issues
Background noise on all images
Still working on improvements
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