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[snf-lithography] Morning Litho Status 10/5/2016

Gary J Sosa gsosa at stanford.edu
Wed Oct 5 07:46:04 PDT 2016


Good morning All..
New Issues-
None-
General Information/Lab Activities

Wednesday, October 05, 2016

ASML Stepper- Scheduled downtime from 7:00am until 4:00pm to investigate and troubleshoot an alignment signal issue. Tool will not be available to Labmembers during this time. Please check Badger for updates and status changes.



Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

DOWN



Scheduled downtime

ASML working on alignment issues































Miscellaneous









  AFM-nsil

PROBLEM

1

Background noise on all images

Still working on improvements












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