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[snf-lithography] LITHO AM Daily Tools Status Report 10/07/16

Mario vilanova at stanford.edu
Fri Oct 7 09:07:11 PDT 2016


*/Good morning All../*

*_New Issues_/-/*

*/None-/*//

*General Information/Lab Activities*

	

*Friday, October 07, 2016***


*//***

*Gary Sosa Out Sick Today 10/**//*

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

AFM-nsil

	

PROBLEM

	

1

	

Background noise on all images

	

*/Still working on improvements/*

	

	

	

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