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[snf-lithography] Morning Litho Status 10/14/2016

Gary J Sosa gsosa at stanford.edu
Fri Oct 14 07:43:47 PDT 2016


Good morning All..
New Issues-
svgdev- A user reports that a wafer dropped into the developer
General Information/Lab Activities

Friday, October 14, 2016

Gary- Out at 3:30



Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

DOWN



System up with no restrictions



SVGDev

PROBLEM

2

Wafer dropped into developer























Miscellaneous









  AFM-nsil

PROBLEM

1

Buggy mouse in nanoscope image window

Will contact vendor for suggestions. Users have a work-around












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