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[snf-lithography] Morning Litho Status 10/31/2016

Gary J Sosa gsosa at stanford.edu
Mon Oct 31 07:34:28 PDT 2016


Good morning All..
New Issues-
woollam- User reports a Z stage limit error
General Information/Lab Activities

Monday, October 31, 2016

s-neox- The system will be down today from 6:00am until 4:30pm. We are moving the system from L 106 to the Woollam room. The tool may be up sooner so please check Bager for tool updates and current status.

Gary- Leaving at 3:00 today


Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions

































Miscellaneous









  AFM-nsil

PROBLEM

3

Buggy mouse in nanoscope image window

Will contact vendor for suggestions. Users have a work-around

KSBonder

DOWN

2

Broken fitting at facility panel

Need to order and replace the fitting

Woollam

PROBLEM

1

Z stage limit error

Need to check out.


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