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[snf-lithography] Morning Litho Status 4/6/2017

Gary J Sosa gsosa at stanford.edu
Thu Apr 6 07:36:06 PDT 2017


Good morning All..
New Issues-
headway2- User reports wafers not spinning
General Information/Lab Activities

Thursday, April 06, 2017

Gary- Hours: 7:00am – 6:30pm




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



Up with no restrictions



Headway2

PROBLEM

1

Not spinning

Need to check out





















Miscellaneous









  KSBonder

PROBLEM



Tool relocating to new area

Tool re-installed in L113. System needs testing by user group.
































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