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[snf-lithography] Morning Litho Status 4/14/2017
Gary J Sosa
gsosa at stanford.edu
Fri Apr 14 08:14:56 PDT 2017
Good morning All..
Svgdev2- User reports a drip on his wafer.
karlsuss- User reports problem with chuck range of movement
General Information/Lab Activities
Friday, April 14, 2017
Mario- Vacation: 4/10 through 4/14
Up with no restrictions
Drip on wafers
Need to check out
Chuck range problem
Need to center the stages and reboot system to reset microscope position.
Tool relocating to new area
Tool re-installed in L113. System needs testing by user group.
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