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[snf-lithography] Litho Am Daily Report 4/20/17

Mario vilanova at stanford.edu
Thu Apr 20 09:06:34 PDT 2017


*/Good morning All../*

*_New Issues_/-/*

*NONE*

*General Information/Lab Activities*

	

Thursday, April 20, 2017

*Gary Sosa Out Vacation  4/19/17- 4/21/17
*

**
**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

Up with no restrictions

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

AFM-nsil

	

PROBLEM

	

1

	

Buggy mouse in nanoscope image window

	

*/Working with users and vendors collecting data on problem./*

KSBonder

	

PROBLEM

	

	

Tool relocating to new area

	

*/Tool re-installed in L113. System needs testing by user group./*

	

	

	

	

*//*

	

	

	

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