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[snf-lithography] Morning Litho Status 4/28/2017

Gary J Sosa gsosa at stanford.edu
Fri Apr 28 08:12:02 PDT 2017


Good morning All..
New Issues-
None-
General Information/Lab Activities

Friday, April 28, 2017

Mario- Out today (4/28)




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

DOWN

1

Focus and tilt unstable

ASML field service notified. They will schedule an FSE visit to troubleshoot and resolve issues.































Miscellaneous









  KSBonder

PROBLEM



Tool relocating to new area

Tool re-installed in L113. System needs testing by user group.
































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