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[snf-lithography] Litho Am Daily Report 3/2/17

Mario vilanova at stanford.edu
Thu Mar 2 08:48:30 PST 2017


*/Good morning All../*

*_New Issues_/-/*

*None-*

*General Information/Lab Activities*

	

Thursday, March  2, 2017

*Gary Sosa Late Shift Today 3/2/17
*

*
*

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

AFM-nsil

	

PROBLEM

	

2

	

Buggy mouse in Nanoscope image window

	

*/Working with users and vendors collecting data on problem./*

KSBonder

	

DOWN

	

1

	

Tool relocating to new area

	

*/Moved tool to new location. Still need to hook up/*

	

	

	

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