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[snf-lithography] Morning Litho Status 3/8/2017

Gary J Sosa gsosa at stanford.edu
Wed Mar 8 07:37:13 PST 2017


Good morning All..
New Issues-
ASML- User reports a wafer transfer problem
evalign- User reports a mask vacuum problem
General Information/Lab Activities

Wednesday, March 08, 2017






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

DOWN

1

Wafer transfer problem

Will check and recover system

EVAlign

DOWN

2

Mask vacuum problem

Troubleshooting in progress





















Miscellaneous









  AFM-nsil

PROBLEM

4

Buggy mouse in nanoscope image window

Working with users and vendors collecting data on problem.

KSBonder

DOWN

3

Tool relocating to new area

Moved tool to new location. Still need to hook up






















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