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[snf-lithography] Morning Litho Status 3/8/2017
Gary J Sosa
gsosa at stanford.edu
Wed Mar 8 07:37:13 PST 2017
Good morning All..
ASML- User reports a wafer transfer problem
evalign- User reports a mask vacuum problem
General Information/Lab Activities
Wednesday, March 08, 2017
Wafer transfer problem
Will check and recover system
Mask vacuum problem
Troubleshooting in progress
Buggy mouse in nanoscope image window
Working with users and vendors collecting data on problem.
Tool relocating to new area
Moved tool to new location. Still need to hook up
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