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[snf-lithography] Litho Area Daily Tools Report 10/16/17

Mario vilanova at stanford.edu
Mon Oct 16 06:58:25 PDT 2017


*/Good morning All../*

*_New Issues_/-/*

*None-*

*General Information/Lab Activities*

	

Monday, October 16, 2017

*Gary Sosa Out Today 10/16/17 *

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

Up with no restrictions

	

*//*

Yes Oven

	

PROBLEM

	

1

	

Display temperature off

	

*/Adjusted actual temperature with external probe as a work-around./*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

	

*//*

	

	

	

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