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[snf-lithography] Morning Litho Status 10/23/2017

Gary J Sosa gsosa at stanford.edu
Mon Oct 23 07:35:16 PDT 2017


Good morning All..
New Issues-
None-
General Information/Lab Activities

Monday, October 23, 2017






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



Up with no restrictions



Yes Oven

PROBLEM

1

Display temperature off

Adjusted actual temperature with external probe as a work-around.





















Miscellaneous









  Woollam

PROBLEM

2

Alignment error

Performed system setup and adjusted/ calibrated as needed. Also working with Tech Support. System is usable
































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