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[snf-lithography] Morning Litho Status 10/24/2017

Gary J Sosa gsosa at stanford.edu
Tue Oct 24 07:47:03 PDT 2017


Good morning All..
New Issues-
karlsuss- User reports error message on display
General Information/Lab Activities

Tuesday, October 24, 2017






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



Up with no restrictions



Yes Oven

PROBLEM

1

Display temperature off

Adjusted actual temperature with external probe as a work-around.

Karlsuss

PROBLEM

3

Error message on display

Need to check out











Miscellaneous









  Woollam

PROBLEM

2

Alignment error

Performed system setup and adjusted/ calibrated as needed. Also working with Tech Support. System is usable
































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