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[snf-lithography] Morning Litho Status 10/26/2017

Gary J Sosa gsosa at stanford.edu
Thu Oct 26 07:48:40 PDT 2017


Good morning All..
New Issues-
Svgcoat2- User reports an alarm at the coat station
Evbond- User reports problem with host computer
General Information/Lab Activities

Thursday, October 26, 2017

Gary- Leaving at 2:30 today(10/26)




Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



Up with no restrictions



SVGCoat2

PROBLEM

1

System alarms at coat station

Need to check out





















Miscellaneous









  Woollam

PROBLEM

3

Alignment error

Performed system setup and adjusted/ calibrated as needed. Also working with Tech Support. System is usable

EVBonder

PROBLEM

2

Host computer lost communication

Need to check out






















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